Home: Fold trips to opponents all-in?

[JustASpectator]

Home tournament, 6 players started, now down to heads up. 10,000 starting chips, 25/50 blinds to start (followed WSOP main event blind structure, but with 30 min rounds). Heads up against somewhat aggressive opponent (playing good big stack poker). Hero has ~T20,000, Villain has ~T40,000, blinds 300/600 w/ 75 ante. Hero is dealt 62s on the button. Hero limps (Villain has been playing pretty straightforward preflop, raising with good hands and checking mediocre hands when Hero has limped from SB). Villain checks.

Pot: 1350
Flop: J 6 5 (rainbow)
Villain checks
Hero bets T700
Villain calls (range?)
Pot: 2750
Turn: (J 6 5) 9
Villain checks
Hero checks (thoughts on this check?)
Pot: 2750
River: (J 6 5 9) 6
Villain goes all-in
Hero...?

Did my turn check-behind induce a major bluff on the river? How often am I beat here?

Any insight is greatly appreciated! Thanks in advance!