Overcards out of position in NL Hold 'em

[annie2cards]

Recurring problem: Raise 3x BB, 1st in, from early or middle position with hand such as AQ, KQs, AJs, called by one player. Flop misses me, but "safe", so I bet half the pot, and get called. Turn is a blank, make about the same bet (which is now 1/4 pot) and get called again. River is a blank, I don't think he's going to fold to a bet so I check, caller makes solid bet and I fold, losing a lot of chips. Where am I going wrong?